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Research article - Peer-reviewed, 2021

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Samii, Rouzbeh; Zanders, David; Buttera, Sydney C.; Kessler, Vadim; Ojamae, Lars; Pedersen, Henrik; O'Brien, Nathan J.


Amidinate and guanidinate ligands have been used extensively to produce volatile and thermally stable precursors for atomic layer deposition. The triazenide ligand is relatively unexplored as an alternative ligand system. Herein, we present six new Al(III) complexes bearing three sets of a 1,3-dialkyltriazenide ligand. These complexes volatilize quantitatively in a single step with onset volatilization temperatures of similar to 150 degrees C and 1 Torr vapor pressures of similar to 134 degrees C. Differential scanning calorimetry revealed that these Al(III) complexes exhibited exothermic events that overlapped with the temperatures of their mass loss events in thermogravimetric analysis. Using quantum chemical density functional theory computations, we found a decomposition pathway that transforms the relatively large hexacoordinated Al(III) precursor into a smaller dicoordinated complex. The pathway relies on previously unexplored interligand proton migrations. These new Al(III) triazenides provide a series of alternative precursors with unique thermal properties that could be highly advantageous for vapor deposition processes of Al containing materials.

Published in

Inorganic Chemistry
2021, volume: 60, number: 7, pages: 4578-4587

Authors' information

Samii, Rouzbeh
Linkoping University
Zanders, David
Carleton University
Buttera, Sydney C.
Carleton University
Swedish University of Agricultural Sciences, Department of Molecular Sciences
Ojamae, Lars
Linkoping University
Pedersen, Henrik
Linkoping University
O'Brien, Nathan J.
Linkoping University

UKÄ Subject classification

Inorganic Chemistry

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