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Research article - Peer-reviewed, 2022

Synthesis, Structure, and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition

Samii, Rouzbeh; Fransson, Anton; Mpofu, Pamburayi; Niiranen, Pentti; Ojamaee, Lars; Kessler, Vadim; O'Brien, Nathan J.

Abstract

Group 11 thin films are desirable as interconnects in microelectronics. Although many M-N-bonded Cu precursors have been explored for vapor deposition, there is currently a lack of suitable Ag and Au derivatives. Herein, we present monovalent Cu, Ag, and Au 1,3-di-tert-butyltriazenides that have potential for use in vapor deposition. Their thermal stability and volatility rival that of current state-of-the-art group 11 precursors with bidentate M-N-bonded ligands. Solution-state thermolysis of these triazenides yielded polycrystalline films of elemental Cu, Ag, and Au. The compounds are therefore highly promising as single-source precursors for vapor deposition of coinage metal films.

Published in

Inorganic Chemistry
2022, Volume: 61, number: 51, pages: 20804-20813
Publisher: AMER CHEMICAL SOC

    UKÄ Subject classification

    Inorganic Chemistry

    Publication identifier

    DOI: https://doi.org/10.1021/acs.inorgchem.2c03071

    Permanent link to this page (URI)

    https://res.slu.se/id/publ/120565