Processing of nano-holes and pores on SiO2 thin films by MeV heavy ions. <I>Nucl. Instrum. Methods Phys. Res., Sect. B

Silva C, Milanez; Varisco, P; Moehlecke, A; Fichtner P, P; Papaléo R, m; Eriksson, Jan

doi:10.1016/s0168-583x(03)00803-6

Research article2003Peer reviewedOpen access

Processing of nano-holes and pores on SiO2 thin films by MeV heavy ions. Nucl. Instrum. Methods Phys. Res., Sect. B

Silva C, Milanez; Varisco, P; Moehlecke, A; Fichtner P, P; Papaléo R, m; Eriksson, Jan

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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003, number: 206, pages: 486-489
Publisher: Elsevier

SLU Authors
Eriksson, Jan
Department of Molecular Sciences, Swedish University of Agricultural Sciences

Publication identifier

DOI: https://doi.org/10.1016/s0168-583x(03)00803-6

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https://res.slu.se/id/publ/1642