Synthesis, Structure, and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition

Sammanfattning

Group 11 thin films are desirable as interconnects in microelectronics. Although many M-N-bonded Cu precursors have been explored for vapor deposition, there is currently a lack of suitable Ag and Au derivatives. Herein, we present monovalent Cu, Ag, and Au 1,3-di-tert-butyltriazenides that have potential for use in vapor deposition. Their thermal stability and volatility rival that of current state-of-the-art group 11 precursors with bidentate M-N-bonded ligands. Solution-state thermolysis of these triazenides yielded polycrystalline films of elemental Cu, Ag, and Au. The compounds are therefore highly promising as single-source precursors for vapor deposition of coinage metal films.

Publicerad i

Inorganic Chemistry
2022, Volym: 61, nummer: 51, sidor: 20804-20813
Utgivare: AMER CHEMICAL SOC

SLU författare

• Kessler, Vadim

  • Institutionen för molekylära vetenskaper, Sveriges lantbruksuniversitet
    

UKÄ forskningsämne

Inorganic Chemistry


Publikationens identifierare

DOI: https://doi.org/10.1021/acs.inorgchem.2c03071

Permanent länk till denna sida (URI)

https://res.slu.se/id/publ/120565