Skip to main content
SLU publication database (SLUpub)
Research article - Peer-reviewed, 2003

Processing of nano-holes and pores on SiO2 thin films by MeV heavy ions. Nucl. Instrum. Methods Phys. Res., Sect. B

Silva C Milanez, Varisco P, Moehlecke A, Fichtner P P, Papaléo R m, Eriksson Jan

Published in

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003, number: 206, pages: 486-489
Publisher: Elsevier